Elpida Memory, Inc.
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Management of Chemical Substances, Waste Management

Management of Chemical Substances

In the semiconductor manufacturing process, numerous chemical substances (chemicals and gases) are used during a range of processes such as wafer cleaning, patterning, and film deposition, as well as in wastewater treatment. Whenever such chemical substances are introduced, a preliminary review of each chemical is carried out to evaluate it in environmental and safety terms throughout its use and disposal, and a decision is made on whether or not it can be introduced.

Items for preliminary review
- Related legislation, restricted chemical substances
- Hazard ranking
- Treatment method at disposal
- Place of use
- Handling method (wearing protective equipment etc.)
- Measures for emergencies, fires, and spillages

 
Breakdown of chemicals use
 

Waste Management and Recycling and Reuse of Resources

Used chemicals generated during the semiconductor manufacturing process are divided into those reused in-house, those that are valuable resources reused or recycled by other companies, and those that are disposed of outside the Elpida Memory Group. As production volume increased in FY2006, the amount of waste generated rose by 30% compared with FY2005. It is absolutely vital to ensure stable applications for recycled materials.
Waste generated other than during the manufacturing process is divided into categories such as waste plastic, scrap glass, scrap metal, and raw garbage, and Elpida is working to recycle these too.

     
FY2006 breakdown of waste generation and FY2006 waste categories
Changes in waste generation
 

* Until FY2005 the figures are for Hiroshima Elpida Memory only. From FY2006 they are the total for Elpida Memory, Hiroshima Elpida Memory, and Akita Elpida Memory.

 

Examples of waste reuse and recycling

Category
Type
Details
Reuse in-house
Chemicals
After use in production, used in wastewater treatment
Reuse by other companies
Fluoronitric acid
After use in production, used to clean stainless steel
Recycling and reuse by other companies
Hydrofluoric acid
After use in production, used as raw material for hydrofluoric acid
Developing fluid
After use in production, used as raw material for developing fluid
Solvents
Combustion improvers
Scrap metal
Raw material for metals, solar batteries
Raw garbage
Composted for fertilizer
Waste disposal by other companies
Sludge
Raw material for cement
Waste plastic
Solid fuel, combustion improver, raw material for plastic
Scrap glass
Road bed material
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